Nimbus : Stratus : Cirrus : Publications

Introducing the APOLLO Next Generation PVD System

APOLLO wins Attendees' Choice Award at Semicon West for Best Cost-of-Ownership Product (pictured below, Pete Singer, Editor-in-Chief, Solid State Technology, and Dick Post, NEXX CEO)

NEXX Launches New APOLLO Sputter Deposition System
Billerica - July 9, 2008 PRESS RELEASE ...

MULTIMEDIA INTRODUCTION

APOLLO Sputter Deposition System
DATASHEET...

Electro-deposition plating system
ShearPlate^TM fluid agitation
Advanced wafer contact and seal

Sputter deposition system
Up to 5 sputter sources
100 to 300mm (round) or up to 300 x 600 substrates

Plasma cleaning
Cleaning prior to wire bonding, die attach, or encapsulation
Low operating pressure, 5 - 10 mTorr; high plasma density

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