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Electro-deposition : Cirrus : ECR : Publications Library

Cirrus Brochure (PDF) : Cirrus FAQs : Cirrus 80 Advantages

NEXX Systems is currently the only manufacturer who focuses on ECR technology. Our ECR sources produce a highly uniform plasma with superior film characteristics, compared to competitive technology.

Cirrus 80

The Cirrus 80 (formerly Series Ii) is a barrel-style system used in packaging for cleaning prior to wire bonding, die attach, or encapsulation. Batch size is approximately 20 lead frame magazines. This tool has been used in the production of displays and as a development tool in packaging.

Additional Advantages of Cirrus 80 Processing

Tech Brief: Plasma Cleaning (PDF)

Tech Brief: Surface Modification (PDF)

Cirrus 150 and 300

Systems for deposition and plasma etch used in manufacturing thin film heads, ink jet print heads, and opto-electronic devices.

UPDATE June 12, 2007

Cirrus 150 and 300 products are now available from Seki Technotron. Please contact them directly for any inquiries regarding these two products.

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