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APOLLO sputter deposition is honored with Attendees' Choice Award for Best Cost-of-Ownership Product at Semicon West 2008.


Background

NEXX Systems was founded in August 2001 through the acquisition from MKS Instruments of the ASTeX systems group. The sale comprised the purchase of the Nimbus product line of sputter deposition systems and exclusive license to manufacture ECR microwave-driven plasma systems, originally sold as PlasmaQuest and now known as Cirrus. NEXX Systems’ core technologies — reactive gas/plasma processing, low temperature CVD, and PVD of thin films — are well developed in the fabrication of integrated circuits. With the acquisition of All-Wet Technologies in April 2003, NEXX Systems enhanced its product offering to include leading edge, low cost, high performance electro-deposition technology for metal and photoresist.

Board of Directors and Management Team

Richard Post — CEO and Chairman
Dick was a co-founder of Applied Science and Technology, Inc. (ASTeX), which merged with MKS Instruments in January 2001. He served as ASTeX’s CEO and Chairman from its inception and as President until August 2000. Prior to founding ASTeX, he served at MIT as a senior research scientist and head of the Mirror Confinement Division of the Plasma Fusion Center. Dick has a PhD in plasma physics from Columbia University and completed the owner/president management program at Harvard Business School.

Bruce C. Rhine — Director (Chairman, Nanometrics, Inc.)
Bruce has 24 years of product marketing, business development, and senior management experience in the semiconductor capital equipment industry. He co-founded Accent Optical Technologies, a leading supplier of overlay and thin film metrology and process control systems to the global semiconductor manufacturing industry. In January 2006, Accent announced it was merging with Nanometrics, Inc. Bruce founded a CVD equipment firm, managed a $175 million oxide etch business unit at Lam Research, was president and COO of Asyst Technologies, and founded and sold a successful CMP company -Obsidian, Inc. - to Applied Materials. He has an MBA in finance and a BS in chemical engineering from The Pennsylvania State University.

Robert G. Deuster— Director
Bob served as CEO and as a member of the Board of Directors for Newport Corporation from May 1996 to October 2007; from June 1997 to October 2007, he served as Chairman of the Board. He also served as president from May 1996 to July 2004. From 1985, he served in various senior management positions at Applied Power, Inc., an international manufacturer of electrical and hydraulic products. From 1975 to 1985, he held engineering and marketing management positions at General Electric Company's Medical Systems Group.

Robert W. Conn— Director (Managing Director, Enterprise Partners Venture Capital)
Bob joined Enterprise in July 2002 after nine years as Dean of the Jacobs School of Engineering at the University of California, San Diego. At UCSD Bob led the school through a period of unprecedented growth, establishing major research centers in fields ranging from wireless communications and nanotechnology to networking and bioengineering. Bob also co-founded Plasma & Materials Technologies, a semiconductor etch and deposition equipment company that went public.

Clifford Haas — Director (Managing Director, Sigma Partners)
Cliff has been with Sigma for over 20 years, working with multiple portfolio companies. He combines his prior experience as a consultant and engineer to provide counsel to entrepreneurs on how to build strong businesses. He has been involved with investments in a variety of sectors, focused largely on business software applications, storage, and semiconductor capital equipment. Prior to Sigma, Cliff was with Cresap, McCormick and Paget, a general management consulting firm; and, previously with American Panpacific Corporation. He has an MBA from Stanford University and a BS in engineering from California Polytechnic State University.

R. Douglas Norby — Director
Doug most recently served as Senior Vice President and Chief Financial Officer of Tessera Technologies, Inc. He was previously Executive Vice President and CFO of LSI Logic Corporation and has served as a member of its Board of Directors since 1993. He has also held CFO positions with Novalux, Mentor Graphics, Syntex Corporation, and Itel Corporation, among others. From 1985-1992, Norby served as President and COO of Lucasfilm Ltd. Norby is a director of LSI Logic Corporation, Alexion Pharmaceuticals, Inc., Jazz Semiconductor, Inc., Neterion, Inc. and STATSChipPAC Ltd., and serves as the Chairman of Alexion’s, Jazz Semiconductor’s and Neterion’s audit committee. He received his B. in Economics from Harvard University and MBA. from Harvard Business School.

Stanley D. Piekos— Vice President, Finance, and CFO
Stan has over 25 years experience in financial and strategic management within fast growth, high tech industries, with particular focus in public financing and strategic mergers and acquisitions. Before coming to NEXX, he was CFO at August Technology. He has an MBA from Babson College and a BA in finance from Northeastern University.

Arthur Keigler — Vice President of Technology
Arthur has over 20 years experience in wafer processing. He holds an MS in materials science and engineering from MIT and a BS in applied and engineering physics from Cornell. He was also a Leaders for Manufacturing Fellow at MIT, earning an MS in business management and an MS in mechanical engineering. He holds several patents in the field of wafer processing equipment.

John Bowers — Vice President of Customer Operations
John has more than 28 years' experience in semiconductor capital equipment sales and sales management. At Novellus, he served as general manager of Novellus, greater China region, and president of Novellus, SE Asia region. Most recently, he served as managing director of Novellus' global account with Intel. He had been at Novellus for 19 years, and before that at Focus Systems, Genus, Anelva, and Varian. A graduate in mathematics and mechanical engineeing from Bucknell University, he also has an MBA from the University of Pittsburgh.

Phillip Villari— Vice President of Operations
Phil comes to NEXX with more than 25 years of operational experience in the manufacture of front and back end semiconductor capital equipment. Previously he worked at Semitest, Micro Component Technology/Aseco (MCT), Electro Scientific Industries, and Creative Dynamics. He has a BS in industrial technology from Clarkson College of Technology.

 

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