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APOLLO sputter deposition is honored with Attendees' Choice
Award for Best Cost-of-Ownership Product at Semicon West 2008.
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Background
NEXX Systems was founded in August 2001 through the acquisition from MKS Instruments
of the ASTeX systems group. The sale comprised the purchase of the Nimbus
product line of sputter deposition systems and exclusive license to manufacture
ECR microwave-driven plasma systems, originally sold as PlasmaQuest and
now known as Cirrus. NEXX Systems core technologies — reactive
gas/plasma processing, low temperature CVD, and PVD of thin films —
are well developed in the fabrication of integrated circuits. With the
acquisition of All-Wet Technologies in April 2003, NEXX Systems enhanced
its product offering to include leading edge, low cost, high performance
electro-deposition technology for metal and photoresist.
Board
of Directors and Management Team
Richard Post — CEO and Chairman
Dick was a co-founder of Applied Science and Technology, Inc. (ASTeX),
which merged with MKS Instruments in January 2001. He served as ASTeXs
CEO and Chairman from its inception and as President until August 2000.
Prior to founding ASTeX, he served at MIT as a senior research scientist
and head of the Mirror Confinement Division of the Plasma Fusion Center.
Dick has a PhD in plasma physics from Columbia University and completed
the owner/president management program at Harvard Business School.
Bruce C. Rhine — Director (Chairman, Nanometrics, Inc.)
Bruce has 24 years of product marketing, business development, and senior
management experience in the semiconductor capital equipment industry.
He co-founded Accent Optical Technologies, a leading supplier of overlay
and thin film metrology and process control systems to the global semiconductor
manufacturing industry. In January 2006, Accent announced it was merging
with Nanometrics, Inc. Bruce founded a CVD equipment firm, managed a $175
million oxide etch business unit at Lam Research, was president and COO
of Asyst Technologies, and founded and sold a successful CMP company -Obsidian,
Inc. - to Applied Materials. He has an MBA in finance and a BS in chemical
engineering from The Pennsylvania State University.
Robert G. Deuster— Director
Bob served as CEO and as a member of the Board of Directors for Newport
Corporation from May 1996 to October 2007; from June 1997 to October 2007,
he served as Chairman of the Board. He also served as president from May
1996 to July 2004. From 1985, he served in various senior management positions
at Applied Power, Inc., an international manufacturer of electrical and
hydraulic products. From 1975 to 1985, he held engineering and marketing
management positions at General Electric Company's Medical Systems Group.
Robert W. Conn— Director (Managing Director, Enterprise Partners
Venture Capital)
Bob joined Enterprise in July 2002 after nine years as Dean of the Jacobs
School of Engineering at the University of California, San Diego. At UCSD
Bob led the school through a period of unprecedented growth, establishing
major research centers in fields ranging from wireless communications
and nanotechnology to networking and bioengineering. Bob also co-founded
Plasma & Materials Technologies, a semiconductor etch and deposition
equipment company that went public.
Clifford Haas — Director (Managing Director, Sigma Partners)
Cliff has been with Sigma for over 20 years, working with multiple portfolio
companies. He combines his prior experience as a consultant and engineer
to provide counsel to entrepreneurs on how to build strong businesses.
He has been involved with investments in a variety of sectors, focused
largely on business software applications, storage, and semiconductor
capital equipment. Prior to Sigma, Cliff was with Cresap, McCormick and
Paget, a general management consulting firm; and, previously with American
Panpacific Corporation. He has an MBA from Stanford University and a BS
in engineering from California Polytechnic State University.
R.
Douglas Norby — Director
Doug most recently served as Senior Vice President and Chief Financial
Officer of Tessera Technologies, Inc. He was previously Executive Vice
President and CFO of LSI Logic Corporation and has served as a member
of its Board of Directors since 1993. He has also held CFO positions with
Novalux, Mentor Graphics, Syntex Corporation, and Itel Corporation, among
others. From 1985-1992, Norby served as President and COO of Lucasfilm
Ltd. Norby is a director of LSI Logic Corporation, Alexion Pharmaceuticals,
Inc., Jazz Semiconductor, Inc., Neterion, Inc. and STATSChipPAC Ltd.,
and serves as the Chairman of Alexion’s, Jazz Semiconductor’s
and Neterion’s audit committee. He received his B. in Economics
from Harvard University and MBA. from Harvard Business School.
Stanley
D. Piekos— Vice President, Finance, and CFO
Stan has over 25 years experience in financial and strategic management
within fast growth, high tech industries, with particular focus in public
financing and strategic mergers and acquisitions. Before coming to NEXX,
he was CFO at August Technology. He has an MBA from Babson College and
a BA in finance from Northeastern University.
Arthur Keigler — Vice President of Technology
Arthur has over 20 years experience in wafer processing. He holds an MS
in materials science and engineering from MIT and a BS in applied and
engineering physics from Cornell. He was also a Leaders for Manufacturing
Fellow at MIT, earning an MS in business management and an MS in mechanical
engineering. He holds several patents in the field of wafer processing
equipment.
John Bowers — Vice President of Customer Operations
John has more than 28 years' experience in semiconductor capital equipment
sales and sales management. At Novellus, he served as general manager
of Novellus, greater China region, and president of Novellus, SE Asia
region. Most recently, he served as managing director of Novellus' global
account with Intel. He had been at Novellus for 19 years, and before that
at Focus Systems, Genus, Anelva, and Varian. A graduate in mathematics
and mechanical engineeing from Bucknell University, he also has an MBA
from the University of Pittsburgh.
Phillip Villari— Vice President of Operations
Phil comes to NEXX with more than 25 years of operational experience in
the manufacture of front and back end semiconductor capital equipment.
Previously he worked at Semitest, Micro Component Technology/Aseco (MCT),
Electro Scientific Industries, and Creative Dynamics. He has a BS in industrial
technology from Clarkson College of Technology.
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